Lam Research has launched Dextro, a new collaborative robot designed to meet the needs of semiconductor manufacturing equipment maintenance. This mobile robot is already operational in various advanced wafer fabs worldwide, managing maintenance for 50 to 100 chambers in Lam tools each month.
Unique Features of Dextro
Dextro tackles major issues in semiconductor maintenance and boasts three key features. Firstly, it installs consumable parts with more than twice the accuracy compared to human workers, enhancing etch performance at the wafer's edges. Additionally, it tightens vacuum-sealing bolts to exact specifications, removing the common 5 percent error rate associated with manual work. This improvement minimizes the risk of temperature changes in the chambers that could disrupt production.
Enhanced Cleaning Processes
Furthermore, Dextro includes automated cleaning and polymer removal technology that efficiently eliminates side-wall build-up in the chambers without the need for disassembling the lower sections. This innovation increases safety by removing the necessity for protective equipment like breathing masks, which were essential during manual cleanings.
Industry Insights
Young Ju Kim, who is the VP and head of the Memory Etch Technology Team at Samsung Electronics, emphasized the significance of prompt and effective maintenance: "When manufacturing equipment needs maintenance, it’s critical that it’s performed swiftly and effectively to prevent tool downtime and unnecessary costs. Error-free maintenance from Dextro contributes to better production variability and yield."
Currently, Dextro is compatible with Lam's Flex G and H series dielectric etch tools, with plans to broaden its compatibility across more equipment by 2025. The system operates on a mobile cart and is managed by fab technicians or engineers, utilizing different end-effectors for various maintenance jobs.
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